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Doc. No. PR060920E
JSR Micro, Inc. Selects RF3 Track System from Sokudo Co., Ltd.
 SUNNYVALE, California — September 20, 2006 — JSR Micro, Inc., the Sunnyvale-based U.S. op- erations for JSR Corporation of Tokyo, Japan, has purchased an RF3 track system from Sokudo Co., Ltd. to enhance its manufacturing capabilities. JSR Micro will take delivery of a new RF3 track from Sokudo in the fourth quarter of this year.
Sokudo’s RF3 track system will be used primarily to provide state-of-the-art capability for 65nm and 45nm node manufacturing. In addition, the RF3 will be used for advanced development in ArF, multilayer ma- terials, chemical shrink materials and Top Antireflective Coatings (TARCs) for the 45nm node and below.
To better meet industry needs, JSR Micro is converting its facilities from 200 to 300 mm capability.
“Our top tier customers require suppliers to have advanced development and manufacturing facilities,” said Eric Johnson, President of JSR Micro. “By moving our fab to 300mm, along with moving to a higher NA scanner, we are able to support our most advanced customers’ needs.”
The Sokudo RF3 coat/develop track system was selected because of its flexibility and advanced pro- cessing capability. The RF3 is designed with a modular structure, allowing flexibility when the needs of the technology change. This allows short lead-times, quick installs and enhances reliability. Additionally, pro- cess support for JSR Micro will be available from the nearby Sokudo engineering resources within Applied Materials’ Maydan Technology Center, Santa Clara, California.
“Placement of an RF3 at JSR Micro is an additional step toward strengthening alliances with leaders in the lithography market,” said Akira Yamano, Executive Vice President, Sokudo. “Working with JSR Micro allows Sokudo to expand our materials knowledge-base on the RF3 that meets customers’ most advanced lithography process requirements.”
About JSR Micro, Inc.
JSR Micro, Inc. is the US operations for JSR Corporation of Tokyo, Japan. JSR Micro produces and supplies custom materials for the advanced semiconductor and electronic device fabrication industries. As an established, worldwide supplier of lithography process products, JSR Micro continues to expand its reach in electronic materials with CMP slurries and pads, packaging materials and spin-on low-k dielectrics.
About Sokudo Co., Ltd.
Sokudo Co., Ltd., headquartered in Kyoto, Japan, is a joint venture company owned by Dainippon Screen Mfg. Co., Ltd. and Applied Materials, Inc. Sokudo was established on July 3, 2006 for the development, manufacturing, sales and service of advanced coat/develop track equipment for semiconductor production. Its website is www.sokudospeed.com.
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