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14th Annual SOKUDO Lithography Breakfast Forum
"Lithocell Productivity: Scanner vs. Track"
The July 18, 2007 forum featured the semiconductor manufacturer's perspective by SEMATECH / IBM, lithography materials supplier JSR Microelectronics, and lithography track equipment supplier SOKUDO. Forum presentations were followed by a panel discussion, question-and-answer session with representatives from scanner and track equipment makers: ASML, Canon, Nikon and SOKUDO.
For more details see on-line SEMICONDUCTOR INTERNATIONAL article "Track, Scanner Push for Litho Productivity" by Aaron Hand: http://www.semiconductor.net/article/CA6462925.html
Presentation Files
Annual Lithography Breakfast Forum
Presentations from Previous Forums
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